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Atmospheric Pressure Deposition of Silica Thin Film by Photo-CVD Using Vacuum Ultraviolet Excimer Lamp

Yoshinari MAEZONO, Atsushi YOKOTANI, Kou KUROSAWA, Nobuyuki HISHINUMA and Hiromitsu MATSUNO
The Review of Laser Engineering 32 (1) 54 (2004)
DOI: 10.2184/lsj.32.54
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