Articles citing this article

The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Simulation and validation of SiO₂ LPCVD from TEOS in a vertical 300 mm multi-wafer reactor

G.J. Schoof, C.R. Kleijn, H.E.A. Van Den Akker, T.G.M. Oosterlaken, H.J.C.M. Terhorst, F. Huussen

J. Phys. IV France, 12 4 (2002) 51-61

DOI: https://doi.org/10.1051/jp4:20020077

PDF (606.4 KB)

This article has been cited by the following article(s):

Heat transfer analysis on wafer annealing process in semiconductor multi-wafer furnace using CFD simulation

Siew Aun Tan, Kok Hwa Yu and Mohd Zulkifly Abdullah
Journal of Mechanical Science and Technology 36 (6) 3143 (2022)
https://doi.org/10.1007/s12206-022-0545-4

Analysis of Temperature and Gas Flow Distribution in Chamber with Wafer Batch

Seung-Hwan Kang and Han Seo Ko
Heat Transfer Engineering 40 (17-18) 1498 (2019)
https://doi.org/10.1080/01457632.2018.1474598