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The influence of the conditions of synthesis on the composition and mechanical properties of silicon oxycarbonitride nanocomposite films
N. I. Fainer, A. G. Plekhanov, M. N. Khomyakov, E. A. Maksimovskiy and Yu. M. Rumyantsev Protection of Metals and Physical Chemistry of Surfaces 53(2) 253 (2017) https://doi.org/10.1134/S2070205117020095
A superpowerful source of far-ultraviolet monochromatic radiation