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Cited article:

Two-dimensional recrystallisation processes of nanometric vanadium oxide thin films grown by atomic layer chemical vapor deposition (ALCVD) evidenced by AFM

H. Groult, E. Balnois, A. Mantoux, K. Le Van and D. Lincot
Applied Surface Science 252 (16) 5917 (2006)
https://doi.org/10.1016/j.apsusc.2005.08.014

Thin films of VO2 on glass by atomic layer deposition: microstructure and electrical properties

Pritesh Dagur, Anil U. Mane and S.A. Shivashankar
Journal of Crystal Growth 275 (1-2) e1223 (2005)
https://doi.org/10.1016/j.jcrysgro.2004.11.144