| Issue |
J. Phys. IV France
Volume 112, October 2003
|
|
|---|---|---|
| Page(s) | 1185 - 1188 | |
| DOI | https://doi.org/10.1051/jp4:20031094 | |
J. Phys. IV France 112 (2003) 1185
DOI: 10.1051/jp4:20031094
Optical scanner based on a NiMnGa thin film microactuator
M. Kohl1, S. Hoffmann1, Y. Liu1, M. Ohtsuka2 and T. Takagi31 Forschungszentrum Karlsruhe, IMT, Postfach 3640, 76021 Karlsruhe, Germany
2 Tohoku University, IMRAM, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
3 Tohoku University, IFS, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
Abstract
An optical scanner of 9
3
5 mm
3 size is presented, which is driven by a microactuator of Ni
2MnGa. The microactuator is fabricated by magnetron sputtering of a Ni
2MnGa thin film and subsequent photochemical micromachining. For operation of the scanner, a novel mechanism is proposed, which
is based on the antagonism of magnetic and shape recovery forces. Thus, large bending forces in both actuation directions
and low biasing forces can be generated simultaneously in a single microdevice. This mechanism is used to realize a large
scanning angle of 50 deg. The dynamics of motion is characterized by heat-transfer times. Typical heating and cooling time
constants are 2 and 16 ms, respectively. Below a critical frequency of about 55 Hz, the scanning angle is independent of the
actuation frequency.
© EDP Sciences 2003