| Issue |
J. Phys. IV France
Volume 11, Number PR11, Décembre 2001
International Conference on Thin Film Deposition of Oxide Multilayers Hybrid Structures
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| Page(s) | Pr11-267 - Pr11-272 | |
| DOI | https://doi.org/10.1051/jp4:20011143 | |
J. Phys. IV France 11 (2001) Pr11-267-Pr11-272
DOI: 10.1051/jp4:20011143
Modeling the diffraction profiles of CVD-grown perovskite oxide superlattices
E. Dooryhee1, J.L. Hodeau1, M. Nemoz1, J.A. Rodriguez1, C. Dubourdieu2, R. Pantou2, M. Rosina2, F. Weiss2, J.P. Sénateur2, M. Audier2, H. Roussel2 and J. Lindner31 Laboratoire de Cristallographie, BP, 166X, 38042 Grenoble, France
2 Laboratoire des Matériaux et du Génie Physique, ENSPG, BP. 46, 38402 Saint-Martin-d'Hères, France
3 AIXTRON AG, Kackerstr, 15-17, 52072 Aachen, Germany
Abstract
(BaTiO3/SrTiO3)15 superlattices are grown by chemical vapor deposition of organic metals (MOCVD) on <001> oriented Nb-doped SrTiO3 substrates. The source uses a pulsed liquid-injection system, with a unique precursor solution for each compound. Using a monochromatic, parallel X-ray synchrotron beam in the θ/2θ reflection diffraction geometry, the (00L) diffraction profiles are recorded from L=l to L=8. The observed satellite peaks around the fundamental (00L) Bragg reflections indicate a highly coherent superlattice arrangement, well epitaxied on the substrate. The diffraction profiles are fitted, taking into account the structural and chemical disorder which depart from the ideal defect-free perovskite superlattice. The statistical fluctuations of the thickness of each sub-layer and the coherence length of the stacking are introduced. With this modelisation, we have quantified the macro-strain and the large interdiffusion which take place at the BaTiO3/SrTiO3 interface.
© EDP Sciences 2001