Proceedings of the Twelfth European Conference on Chemical Vapour Deposition

J. Phys. IV France 09 (1999) Pr8-445-Pr8-452
DOI: 10.1051/jp4:1999856

Preparation and properties of cosmo-mimetic carbon micro-coils and ceramic micro-solenoids/micro-tubes by CVD process

S. Motojima¹, X. Chen², T. Kuzuya¹, W.-I. Hwang¹, M. Fujii³ and H. Iwanaga<sup>4

1</sup>  Department of Applied Chemistry, Faculty of Engineering, Gifu University, Gifu 501-1193, Japan
²  Faculty of Chemical Engineering, Huaqiao University, Quanzhuo, Jujian 362011, Japan
³  Faculty of Engineering, Nagasaki Institute of Applied Science, Nagasaki 851-0123, Japan
⁴  Department of Materials Science, Faculty of Engineering, Nagasaki University, Nagasaki 852-8521, Japan

Abstract
Cosmo-mimetic carbon micro-coils were obtained by the catalytic pyrolysis of acetylene with a small amount of thiophene, and the preparation conditions were examined. The oxidation of a metal catalyst strongly affects the growth of carbon coils. Light emission and a temperature increase of 20-25°C were observed during the reaction, and these have some relationships with the reaction of growing carbon coils. Application of a bias voltage to the substrate was very effective for obtaining a high coil yield. The carbon coils could be graphitized by a heat treatment at 3000°C for 6 hrs in a CO/CO₂ atmosphere. TaC micro-solenoids/micro-tubes and other ceramic micro-tubes, such as TiC, TiN, NbC, and NbN, were prepared by the vapor phase metallizing and metallizing/nitriding of the regular and densely coiled carbon coils.

© EDP Sciences 1999