| Issue |
J. Phys. IV France
Volume 09, Number PR8, September 1999
Proceedings of the Twelfth European Conference on Chemical Vapour Deposition
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| Page(s) | Pr8-165 - Pr8-172 | |
| DOI | https://doi.org/10.1051/jp4:1999820 | |
J. Phys. IV France 09 (1999) Pr8-165-Pr8-172
DOI: 10.1051/jp4:1999820
Kinetic mechanism of the decomposition of dimethyltin dichloride
A.M.B. van Mol1, M.H.J.M. de Croon2, C.I.M.A. Spee1 and J.C. Schouten21 TNO-TPD Division Materials Research and Technology, P.O. Box 595, 5600 AN Eindhoven, The Netherlands
2 Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands
Abstract
Results are reported of a study of the intrinsic kinetics of gas phase reactions. For this purpose a reactor system is designed in such a way that concentration and temperature variations throughout the reactor can be neglected enabling investigation of intrinsic reaction kinetics. The gas phase composition in the reactor is analysed by Fourier Transform Infrared spectroscopy and Mass spectrometry. Investigation of the pyrolysis of dimethyltin dichloride (DMTC) in nitrogen between 370 and 630°C with this system revealed that decomposition starts at 500°C. A linear relationship has been found between the formation of methane, ethane, ethene, and propane and the inlet concentration of DMTC. Also the overall decomposition rate is first order in inlet concentration of DMTC. Linear least squares analysis gives a rate constant with an Arrhenius constant of 9±11015 s-1 and an activation energy of 62.8±3 kcal/mol. A mechanism is proposed that describes all the observations.
© EDP Sciences 1999