Issue |
J. Phys. IV France
Volume 09, Number PR8, September 1999
Proceedings of the Twelfth European Conference on Chemical Vapour Deposition
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Page(s) | Pr8-65 - Pr8-72 | |
DOI | https://doi.org/10.1051/jp4:1999808 |
J. Phys. IV France 09 (1999) Pr8-65-Pr8-72
DOI: 10.1051/jp4:1999808
Routes of metal oxide formation from metal β-diketonates used as CVD precursors
A.E. Turgambaeva, V.V. Krisyuk, A.F. Bykov and I.K. IgumenovInstitute of Inorganic Chemistry, Lavrentiev 3, Novosibirsk 630090, Russia
Abstract
Thermal decomposition mechanism of a number of metal β-diketonates commonly used in CVD has been studied by means of original mass spectrometric technique. Regularities of thermal decomposition of non-fluorinated β-diketonates on hot surface in the absence of intermolecular interactions in the gas phase have been established. Occurrence of the competitive processes of metal and oxide formation is revealed. Routes have been proposed, leading to the formation of metal oxides in the condensed phase in the absence of oxygen under the conditions of collision-free heterogeneous process. Schemes of thermal decomposition with the assumed rearrangements are suggested. Influence of oxygen on thermal stability and products of decomposition of the initial source compound has been shown.
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