Routes of metal oxide formation from metal β-diketonates used as CVD precursors

Abstract
Thermal decomposition mechanism of a number of metal β-diketonates commonly used in CVD has been studied by means of original mass spectrometric technique. Regularities of thermal decomposition of non-fluorinated β-diketonates on hot surface in the absence of intermolecular interactions in the gas phase have been established. Occurrence of the competitive processes of metal and oxide formation is revealed. Routes have been proposed, leading to the formation of metal oxides in the condensed phase in the absence of oxygen under the conditions of collision-free heterogeneous process. Schemes of thermal decomposition with the assumed rearrangements are suggested. Influence of oxygen on thermal stability and products of decomposition of the initial source compound has been shown.