Issue
J. Phys. IV France
Volume 06, Number C8, Décembre 1996
ICIFUAS 11
Eleventh International Conference on Internal Friction and Ultrasonic Attenuation in Solids
Page(s) C8-799 - C8-802
DOI https://doi.org/10.1051/jp4:19968171
ICIFUAS 11
Eleventh International Conference on Internal Friction and Ultrasonic Attenuation in Solids

J. Phys. IV France 06 (1996) C8-799-C8-802

DOI: 10.1051/jp4:19968171

Elasticity Study on Ag nm-Films

H. Mizubayashi, S. Harada and T. Yamaguchi

Institute of Materials Science, University of Tsukuba, Tsukuba 305, Japan


Abstract
Young's modulus Ef of polycrystalline Ag nm-films deposited on hydrogen-terminated Si was measured in the film thickness d range between 6 and 50 nm by means of the vibrating reed method. Ef observed for d above about 20 nm is slightly higher than the upper bound of Young's modulus expected for polycrystalline Ag bulk-films. On the other hand, with decreasing d, Ef decreases beyond the lower bound of Young's modulus expected for polycrystalline Ag bulk-films. The plausible models to explain these results are discussed.



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