| Issue |
J. Phys. IV France
Volume 05, Number C5, Juin 1995
Proceedings of the Tenth European Conference on Chemical Vapour Deposition
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|---|---|---|
| Page(s) | C5-89 - C5-96 | |
| DOI | https://doi.org/10.1051/jphyscol:1995508 | |
Proceedings of the Tenth European Conference on Chemical Vapour Deposition
J. Phys. IV France 05 (1995) C5-89-C5-96
DOI: 10.1051/jphyscol:1995508
Laboratoire de Matériaux, URA 445, 118 Route de Narbonne, 31077 Toulouse, France
© EDP Sciences 1995
J. Phys. IV France 05 (1995) C5-89-C5-96
DOI: 10.1051/jphyscol:1995508
Mass Spectrometric Study of the Gas Phase During Chemical Vapor Deposition of Pyrolytic Carbon
F. Fau-Canillac, F. Carrere, A. Reynes, C. Vahlas and F. MauryLaboratoire de Matériaux, URA 445, 118 Route de Narbonne, 31077 Toulouse, France
Abstract
The pyrolysis of CH4, of C3H8 and of the mixture 20C3H8/80CH4 was investigated in a hot wall CVD reactor by mass spectrometry. Experiments were conducted as a function of temperature and of surface-to-volume (S/V) ratio of the substrate. The main by-products of the pyrolysis were identified and reaction mechanisms were proposed taking into account homogenous decomposition/formation reactions. Cyclic species are possibly involved in the formation mechanism of pyrocarbon.
© EDP Sciences 1995