J. Phys. IV France
Volume 02, Number C2, Septembre 1991Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
|Page(s)||C2-705 - C2-711|
J. Phys. IV France 02 (1991) C2-705-C2-711
CHEMICAL VAPOR INFILTRATION OF 3D FIBROUS CARBON PREFORMS BY ZIRCONIUM CARBIDEM. NADAL and F. TEYSSANDIER
CNRS, Institut de Science et de Génie des Matériaux et Procédés, Université, avenue de Villeneuve, F-66860 Perpignan cedex, France
The purpose of this paper is to study the infiltration efficiency of the process in the case of ZrC obtained from a ZrCl4-CH4-H2 initial gas mixture. 3D carbon preforms are infiltrated for 8 hours in a hot wall reactor. An experimental design is used to determine the influence of the main factors such as temperature, total pressure and the hydrogen flow rate. The mass increase, as well as the distribution profile of the ZrC infiltration on a cross section of the sample, are measured for each of the eight conditions of a complete factorial design 23. After quantification of the penetration depth of the ZrC coating into the preform both responses are fitted by a polynomial expression. The resulting response surfaces are presented and discussed.
© EDP Sciences 1991