| Issue |
J. Phys. IV France
Volume 02, Number C2, Septembre 1991
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
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| Page(s) | C2-625 - C2-631 | |
| DOI | https://doi.org/10.1051/jp4:1991275 | |
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
J. Phys. IV France 02 (1991) C2-625-C2-631
DOI: 10.1051/jp4:1991275
1 CNRS Institut de Science et de Génie des Matériaux et Procédés, Université, avenue de Villeneuve, F-66860 Perpignan cedex, France
2 Etablissement Technique Central de l'Armement, 16 bis avenue Prieur de la Côte d'Or, F-94114 Arceuil cedex, France
© EDP Sciences 1991
J. Phys. IV France 02 (1991) C2-625-C2-631
DOI: 10.1051/jp4:1991275
TITANOCENE-DICHLORIDE AS A METALORGANIC SOURCE FOR TITANIUM CARBIDE
J. SLIFIRSKI1, G. HUCHET1 and F. TEYSSANDIER21 CNRS Institut de Science et de Génie des Matériaux et Procédés, Université, avenue de Villeneuve, F-66860 Perpignan cedex, France
2 Etablissement Technique Central de l'Armement, 16 bis avenue Prieur de la Côte d'Or, F-94114 Arceuil cedex, France
Abstract
The use of titanocene-dichloride (Cp2TiCl2) as a metalorganic precursor for TiC coating provides layers of very different quality according to its temperature of vaporization in a cold wall CVD reactor. The deposits observed by SEM and characterized by EPMA are related to the experimental procedure. The thermal behavior of the precursor investigated by thermogravimetry (TG), thermogravimetry coupled with differential thermal analysis (TG-DTA) and mass spectroscopy (MS) is used to determine the structural state of Cp2TiCl2 active from a CVD point of view.
© EDP Sciences 1991