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Fabrication of soft X-ray beam splitters for use in the wavelength region around 13 nm

H. Takenaka, S. Ichimaru, T. Haga, T. Ohchi, H. Ito, Y. Muramatsu, E.M. Gullikson and R.C.C. Perera

J. Phys. IV France, 104 (2003) 251-254

DOI: 10.1051/jp4:200300073

H. Takenaka

S. Ichimaru

T. Haga

T. Ohchi

H. Ito

Y. Muramatsu

E.M. Gullikson

R.C.C. Perera

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Copyright / Publiée par : EDP Sciences