Journal de Physique IV

RPECVD thin silicon carbonitride films using hexamethyldisilazane

N.I. Fainer, M.L. Kosinova, Yu.M. Rumyantsev and F.A. Kuznetsov

J. Phys. IV France, 09 PR8 (1999) Pr8-769-Pr8-775

DOI: 10.1051/jp4:1999897

N.I. Fainer

M.L. Kosinova

Yu.M. Rumyantsev

F.A. Kuznetsov

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