Journal de Physique IV

New volatile heterocyclic metal diketonates for MOCVD

A. Drozdov, S. Troyanov, O. Fedorchenko, G. Battiston, C. Pettinari, F. Marchetti and A. Cingolani

J. Phys. IV France, 09 PR8 (1999) Pr8-929-Pr8-934

DOI: 10.1051/jp4:19998117

A. Drozdov

S. Troyanov

O. Fedorchenko

G. Battiston

C. Pettinari

F. Marchetti

A. Cingolani

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