| Numéro |
J. Phys. IV France
Volume 09, Numéro PR8, September 1999
Proceedings of the Twelfth European Conference on Chemical Vapour Deposition
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|---|---|---|
| Page(s) | Pr8-929 - Pr8-934 | |
| DOI | https://doi.org/10.1051/jp4:19998117 | |
Proceedings of the Twelfth European Conference on Chemical Vapour Deposition
J. Phys. IV France 09 (1999) Pr8-929-Pr8-934
DOI: 10.1051/jp4:19998117
1 Inorganic Chemistry Department, Moscow State University, Vorobjevy Gory, 119899 Moscow, Russia
2 ICTIMA-CNR, corso Stati Uniti 4, 35127 Padova, ltaly
3 Dipartimento di Scienze Chimiche, Universita degli Studi di Camerino, via S. Agostino I, 62032 Camerino, ltaly
© EDP Sciences 1999
J. Phys. IV France 09 (1999) Pr8-929-Pr8-934
DOI: 10.1051/jp4:19998117
New volatile heterocyclic metal diketonates for MOCVD
A. Drozdov1, S. Troyanov1, O. Fedorchenko1, G. Battiston2, C. Pettinari3, F. Marchetti3 and A. Cingolani31 Inorganic Chemistry Department, Moscow State University, Vorobjevy Gory, 119899 Moscow, Russia
2 ICTIMA-CNR, corso Stati Uniti 4, 35127 Padova, ltaly
3 Dipartimento di Scienze Chimiche, Universita degli Studi di Camerino, via S. Agostino I, 62032 Camerino, ltaly
Abstract
The new type of β-diketonate ligand, 4-acylpyrazol-5-ones were used for preparation of copper(II) and barium complexes. Two copper and two barium complexes containing neutral N- and O-donor ligands (such as phen, dipy, tetraglyme) have been structurally characterized by single crystal X-ray diffractometry. The volatility of copper compounds obtained has been studied. The preliminary CVD experiments have been conducted.
© EDP Sciences 1999