LPCVD boron carbonitride films from triethylamine borane M.L. Kosinova, N.I. Fainer, Yu.M. Rumyantsev, A.N. Golubenko et F.A. Kuznetsov J. Phys. IV France, 09 PR8 (1999) Pr8-915-Pr8-921 DOI: 10.1051/jp4:19998115
