Journal de Physique IV

IN SITU ELLIPSOMETRY, A MEASUREMENT TECHNIQUE FOR DYNAMIC FILM CHARACTERIZATION AND PROCESS DEVELOPMENT

M. TAMME, R. KAMILLI, P. PADUSCHEK, P. MONTGOMERY and S. ILLSLEY

J. Phys. IV France, 02 C2 (1991) C2-183

DOI: 10.1051/jp4:1991222

M. TAMME

R. KAMILLI

P. PADUSCHEK

P. MONTGOMERY

S. ILLSLEY

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