Modelling of the Deposition of Molybdenum on Silicon from Molybdenum Hexafluoride and Hydrogen E. N. Orij, M. H.J.M. de Croon et G. B. MarinJ. Phys. IV France, 05 C5 (1995) C5-331-C5-338DOI: https://doi.org/10.1051/jphyscol:1995539
