| Numéro |
J. Phys. IV France
Volume 129, October 2005
|
|
|---|---|---|
| Page(s) | 147 - 150 | |
| DOI | https://doi.org/10.1051/jp4:2005129031 | |
J. Phys. IV France 129 (2005) 147-150
DOI: 10.1051/jp4:2005129031
Ion implanted substrates for SAW gas sensors*
M. Pasternak1 and K. Jasek21 Institute of Radioelectronic, Military University of Technology, 00-490 Warsaw, Poland
2 Institute of Chemistry, Military University of Technology, 00-490 Warsaw, Poland
Abstract
An approach to fundamental properties analysis of high
frequency surface acoustic wave (SAW) gas sensors basing on an ion implanted
substrate has been described in the paper. The results of analytical
calculation shows a practical significance of the composite for high
frequency SAW sensors technology.
© EDP Sciences 2005