Numéro |
J. Phys. IV France
Volume 112, October 2003
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Page(s) | 1215 - 1215 | |
DOI | https://doi.org/10.1051/jp4:20031104 |
J. Phys. IV France 112 (2003) 1215
DOI: 10.1051/jp4:20031104
Ti-Ni sputter-deposited SMA thin films and their applications to microactuators
S. Miyazaki and M. HiranoUniversity of Tsukuba, Institute of Materials Science, Tsukuba, Ibaraki 305-8573, Japan
Without abstract
© EDP Sciences 2003
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