| Numéro |
J. Phys. IV France
Volume 09, Numéro PR8, September 1999
Proceedings of the Twelfth European Conference on Chemical Vapour Deposition
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|---|---|---|
| Page(s) | Pr8-861 - Pr8-867 | |
| DOI | https://doi.org/10.1051/jp4:19998108 | |
Proceedings of the Twelfth European Conference on Chemical Vapour Deposition
J. Phys. IV France 09 (1999) Pr8-861-Pr8-867
DOI: 10.1051/jp4:19998108
Université Claude Bemard - Lyon I, UMR-CNRS, bâtiment 731, 43 boulevard du 11 novembre 1918, 69622 Villeurbanne cedex, France
© EDP Sciences 1999
J. Phys. IV France 09 (1999) Pr8-861-Pr8-867
DOI: 10.1051/jp4:19998108
Synthesis and characterisation of β-ketoesterate complexes of yttrium, barium and copper(II) : New precursors for liquid injection MOCVD ?
H. Guillon, S. Daniele and L.G. Hubert-PfalzgrafUniversité Claude Bemard - Lyon I, UMR-CNRS, bâtiment 731, 43 boulevard du 11 novembre 1918, 69622 Villeurbanne cedex, France
Abstract
A serie of M(mpa)x derivatives (M = Y, Ba, Cu ; mpaH = methylpivaloylacetate ; x = 2 or 3) and their adducts M(mpa)xLy [L = TMEDA (N,N,N',N'-tetramethylethane-1,2-diamine), 2,2'-bipyridine, diglyme and 18-crown-6 ether ; y = 1, 2] were synthesised and fully characterised. X-ray structure determinations of Ba(mpa)2(TMEDA)2 and Y(mpa)3(bipy) are described. Better solubility properties than the M(thd)x analogues (thdH = 2,2,6,6-tetramethylheptane-3,5-dione), in non polar and polar solvents such as hexane and diglyme, have proved promising metal-oxide Liquid Injection MOCVD precursors. Their thermal behaviour was investigated by thermogravimetric analysis.
© EDP Sciences 1999