| Numéro |
J. Phys. IV France
Volume 07, Numéro C1, Mars 1997
7th INTERNATIONAL CONFERENCE ON FERRITES
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|---|---|---|
| Page(s) | C1-487 - C1-488 | |
| DOI | https://doi.org/10.1051/jp4:19971198 | |
7th INTERNATIONAL CONFERENCE ON FERRITES
J. Phys. IV France 07 (1997) C1-487-C1-488
DOI: 10.1051/jp4:19971198
Department of Physical Electronics, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro, Tokyo 152, Japan
© EDP Sciences 1997
J. Phys. IV France 07 (1997) C1-487-C1-488
DOI: 10.1051/jp4:19971198
Increase of Saturation Magnetization of Ba Ferrite Films Deposited by Adding Xe Into Sputtering Gas Mixture
K. Noma, N. Matsushita, S. Nakagawa and M. NaoeDepartment of Physical Electronics, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro, Tokyo 152, Japan
Abstract
Ba ferrite thin films with well c-axis orientation were deposited by means of three sputtering systems and the relationships among their microstructure, magnetic characteristics and plasma parameters were discussed. It was clearly confirmed that the suppression of heavy bombardment of energetic particles to the surface of the growing film was the most important for attaining the excellent crystallographic and magnetic characteristics.
© EDP Sciences 1997