Proceedings of the Tenth European Conference on Chemical Vapour Deposition

J. Phys. IV France 05 (1995) C5-497-C5-502
DOI: 10.1051/jphyscol:1995557

Design of Zr(IV) and Hf(IV) Co-Ordination Compounds - Precursors for MOCVD Synthesis of Protective Coatings

A. Grafov¹, E. Mazurenko¹, G.A. Battiston² and P. Zanella<sup>2

1</sup>  V.I. Vernadskii Institute of General and Inorganic Chemistry, National Academy of Sciences of Ukraine, Prosp. Palladina 32/34, Kiev 142, UA-252142, Ukraine
²  Institute of Chemistry, Inorganic Technologies and Advanced Materials, National Research Council of Italy, C.so Stati Uniti 4, Area della Ricerca, 35020 Padua, Italy

Abstract
Design and creation of new materials with unusual, predictable or predeterminated properties become one of the most actual problems of modern applied chemistry. Main demands are discussed, which are made to chemical compounds used in CVD synthesis of functional materials. A division of volatile metal-containing precursors into main classes is given. On the basis of volatility and thermal stabiliti criteria elaborated at IGIC-NASU, we have designed, synthesized and characterized a series of new advanced precursors for Zr(IV) and Hf(IV). Their properties are compared to those of known species. A possibility of formation of requested properties and structure of final materials is shown.

© EDP Sciences 1995