| Numéro |
J. Phys. IV France
Volume 04, Numéro C6, Juin 1994
WOLTE 1Proceedings of the First European Workshop on Low Temperature Electronics |
|
|---|---|---|
| Page(s) | C6-185 - C6-188 | |
| DOI | https://doi.org/10.1051/jp4:1994629 | |
WOLTE 1
Proceedings of the First European Workshop on Low Temperature Electronics
J. Phys. IV France 04 (1994) C6-185-C6-188
DOI: 10.1051/jp4:1994629
Laboratoire de Cristallographie et Sciences des Matériaux, Institut des Sciences de la Matière et du Rayonnement, Boulevard du Maréchal Juin, 14050 Caen cedex, France
© EDP Sciences 1994
Proceedings of the First European Workshop on Low Temperature Electronics
J. Phys. IV France 04 (1994) C6-185-C6-188
DOI: 10.1051/jp4:1994629
High Tc superconductive thin films on semiconductor substrates
P. Lecoeur, B. Blanc-Guillon, H. Murray and B. MerceyLaboratoire de Cristallographie et Sciences des Matériaux, Institut des Sciences de la Matière et du Rayonnement, Boulevard du Maréchal Juin, 14050 Caen cedex, France
Abstract
The deposition of superconductive thin films on semiconducting substrates is one of the most important goals of technological application in "hybrid" devices. We present in this paper the role of the buffer layer between silicon and the superconductive film. These insulating buffer layers induce MIS properties which can be used in microelectronics.
© EDP Sciences 1994