| Numéro |
J. Phys. IV France
Volume 04, Numéro C5, Mai 1994
3ème Congrés français d'acoustique3rd French conference on acoustics |
|
|---|---|---|
| Page(s) | C5-1229 - C5-1232 | |
| DOI | https://doi.org/10.1051/jp4:19945272 | |
3ème Congrés français d'acoustique
3rd French conference on acoustics
J. Phys. IV France 04 (1994) C5-1229-C5-1232
DOI: 10.1051/jp4:19945272
1 Institute of Microelectronic Technology, Russian Academy of Sciences, 142432 Chernogolovka, Moscow District, Russia
2 CNRS, Laboratoire de Cristallographie, BP. 166X, 38042 Grenoble cedex, France
© EDP Sciences 1994
3rd French conference on acoustics
J. Phys. IV France 04 (1994) C5-1229-C5-1232
DOI: 10.1051/jp4:19945272
Visualization of surface acoustic waves by scanning electron microscopy
D.V. ROSHCHUPKIN1, 2, M. BRUNEL2 and L. TUCOULOU21 Institute of Microelectronic Technology, Russian Academy of Sciences, 142432 Chernogolovka, Moscow District, Russia
2 CNRS, Laboratoire de Cristallographie, BP. 166X, 38042 Grenoble cedex, France
Abstract
This paper reports a scanning electron microscopy visualization of surface acoustic waves in single- and poly-domains LiNbO3 crystals. This SEM method is very useful to visualize traveling and standing surface acoustic waves in SAW-devices and to observe the interaction between SAWs and defects on crystal surfaces. Furthermore, we investigated the interaction between SAWs and regular domain structures in LiNbO3 crystals.
© EDP Sciences 1994