J. Phys. IV France 04 (1994) C2-73-C2-77
Mini-device for controlled quartz etchingG. PENTOVELIS and P. COLLET
Rue Keller, Z.I., BP. 16, 10151 Pont-Sainte-Marie, France
We propose a mini-device for an individual quartz chemical etching. It is based on an electrolyte(1)/ solide/ electrolyte(2) double sided contact. When the electrolyte is an etching solution on either one or both sides of quartz (solide), frequency variation can be observed. The implementation of the mini-device is simple and makes automatisation of the etching procedure possible. We expose the mini-device operating and the span of its application.
© EDP Sciences 1994