Numéro
J. Phys. IV France
Volume 01, Numéro C7, Décembre 1991
2nd International Conference
Laser M2P
Page(s) C7-575 - C7-578
DOI https://doi.org/10.1051/jp4:19917153
2nd International Conference
Laser M2P

J. Phys. IV France 01 (1991) C7-575-C7-578

DOI: 10.1051/jp4:19917153

RECENT PROGRESS AT IMFM ON EXCIMER LASERS AND THEIR APPLICATIONS

B. FONTAINE, Ph. DELAPORTE, B. FORESTIER, M. SENTIS, M. AUTRIC, Ph. BOURNOT, D. DUFRESNE and G. INGLESAKIS

IMFM-UM34 CNRS, Aix-Marseille University, 1 rue Honnorat, F-13003 Marseille, France


Abstract
Recent progress made at IMFM on excimer lasers and their applications is presented. It mainly concerns high power and pulse rate frequency discharge excimer lasers, high energy E-Beam pumped excimer lasers, new excitation schemes, photolysis excitation of uv-visible lasers by sliding discharges, new vuv sources using ionic excimers and processing or elaboration of materials with excimer lasers.



© EDP Sciences 1991