J. Phys. IV France 01 (1991) C7-575-C7-578
RECENT PROGRESS AT IMFM ON EXCIMER LASERS AND THEIR APPLICATIONSB. FONTAINE, Ph. DELAPORTE, B. FORESTIER, M. SENTIS, M. AUTRIC, Ph. BOURNOT, D. DUFRESNE and G. INGLESAKIS
IMFM-UM34 CNRS, Aix-Marseille University, 1 rue Honnorat, F-13003 Marseille, France
Recent progress made at IMFM on excimer lasers and their applications is presented. It mainly concerns high power and pulse rate frequency discharge excimer lasers, high energy E-Beam pumped excimer lasers, new excitation schemes, photolysis excitation of uv-visible lasers by sliding discharges, new vuv sources using ionic excimers and processing or elaboration of materials with excimer lasers.
© EDP Sciences 1991