J. Phys. IV France 02 (1991) C2-303-C2-310
LOW PRESSURE CHEMICAL VAPOR DEPOSITION OF TIN OXIDE THIN FILMS FROM AN ORGANOMETALLIC COMPOUND. APPLICATION TO GAS DETECTIONC. PIJOLAT, L. BRUNO and R. LALAUZE
École Nationale Supérieure des Mines de Saint-Etienne, Département de Chimie-Physique des Processus Industriels, 158 Cours Fauriel, F-42023 Saint-Etienne Cedex 2, France
Tin dioxide SnO2 is one of the most common materials used in the fabrication of semiconductor gas sensors The principle of such sensors is based upon the variations of conductivity induced by adsorption of various gases. A low pressure OMCVD apparatus has been developed in order to obtain tin dioxide thin films. Structural and electrical properties have been investigated by different techniques : S.E.M., X-ray diffraction and conductivity measurements in different atmospheres. A correlation is found between the deposition parameters and the electrical properties of CVD-SnO2 thin films.
© EDP Sciences 1991