Numéro
J. Phys. IV France
Volume 05, Numéro C5, Juin 1995
Proceedings of the Tenth European Conference on Chemical Vapour Deposition
Page(s) C5-503 - C5-508
DOI https://doi.org/10.1051/jphyscol:1995558
Proceedings of the Tenth European Conference on Chemical Vapour Deposition

J. Phys. IV France 05 (1995) C5-503-C5-508

DOI: 10.1051/jphyscol:1995558

New Barium Volatile Complexes Useful in CVD

A. Drozdov1, S. Troyanov1, A. Pisarevsky2 and Y. Struchkov2

1  Moscow State University, Department of Chemistry, 119899 Moscow, Lenin Hills, Russia
2  Nesmeyanov Institute of Organoelement Compounds, 28 Vavilov Str., 117813 Moscow, Russia


Abstract
New volatile barium precursors based on pivaloyltrifluoroacetone are obtained and studied. The results of X-ray structure determination of two compounds are given.



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