| Numéro |
J. Phys. IV France
Volume 05, Numéro C5, Juin 1995
Proceedings of the Tenth European Conference on Chemical Vapour Deposition
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|---|---|---|
| Page(s) | C5-503 - C5-508 | |
| DOI | https://doi.org/10.1051/jphyscol:1995558 | |
Proceedings of the Tenth European Conference on Chemical Vapour Deposition
J. Phys. IV France 05 (1995) C5-503-C5-508
DOI: 10.1051/jphyscol:1995558
1 Moscow State University, Department of Chemistry, 119899 Moscow, Lenin Hills, Russia
2 Nesmeyanov Institute of Organoelement Compounds, 28 Vavilov Str., 117813 Moscow, Russia
© EDP Sciences 1995
J. Phys. IV France 05 (1995) C5-503-C5-508
DOI: 10.1051/jphyscol:1995558
New Barium Volatile Complexes Useful in CVD
A. Drozdov1, S. Troyanov1, A. Pisarevsky2 and Y. Struchkov21 Moscow State University, Department of Chemistry, 119899 Moscow, Lenin Hills, Russia
2 Nesmeyanov Institute of Organoelement Compounds, 28 Vavilov Str., 117813 Moscow, Russia
Abstract
New volatile barium precursors based on pivaloyltrifluoroacetone are obtained and studied. The results of X-ray structure determination of two compounds are given.
© EDP Sciences 1995