Numéro
J. Phys. IV France
Volume 05, Numéro C5, Juin 1995
Proceedings of the Tenth European Conference on Chemical Vapour Deposition
Page(s) C5-205 - C5-211
DOI https://doi.org/10.1051/jphyscol:1995523
Proceedings of the Tenth European Conference on Chemical Vapour Deposition

J. Phys. IV France 05 (1995) C5-205-C5-211

DOI: 10.1051/jphyscol:1995523

Mechanism of Thermal Decomposition of Palladium β-Diketonates Vapour on Hot surface

P.P. Semyannikov, V.M. Grankin, I.K. Igumenov and A.F. Bykov

Institute of Inorganic Chemistry, Lavrentieva, 3, Novosibirsk, 630090, Russia


Abstract
The processes of thermal decomposition of palladium(II) β-diketonate complexes were investigated by a high-temperature mass spectrometric method with the use of a high-temperature molecular beam source. It was established that decomposition of the palladium complexes in gas phase processes proceeds by a radical mechanism and depends on temperature. For an additional proof of the existence of the radical particles the spin trap method was applied with a mass spectrometric identification of adducts. The following order of thermal stability of the complexes in gas phase was established : [MATH]. This order is reverse to the thermal stability in a solid state. The thermal decomposition of Pd(aa)2 and Pd(hfa)2 complexes in deuterium showed that the deuterium presence strongly accelerates the decomposition processes.



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