Thirteenth European Conference on Chemical Vapor Deposition

J. Phys. IV France 11 (2001) Pr3-453-Pr3-460
DOI: 10.1051/jp4:2001357

Nanophased ZrO2-CeO2 or TiO2-ZrO2-CeO2 films by CVD as catalysts for hydrocarbon complete combustion

D. Barreca¹, G.A. Battiston², U. Casellato², R. Gerbasi², E. Roncari³, E. Tondello¹ and P. Zanella<sup>2

1</sup>  Dipartimento di Chimica Inorganica, Metallorganica ed Analitica, Centro di Studio sulla Stabilità e Reattività dei Composti di Coordinazione del CNR, Università di Padova, Via Marzolo 1, 35131 Padova, Italy
²  Istituto di Chimica e Tecnologie Inorganiche e dei Materiali Avanzati del CNR, Corso Stati Uniti 4, 35127 Padova, Italy
³  Istituto di Ricerche Tecnologiche per la Ceramica del CNR, Via Granarolo 64, 38018 Faenza, Italy

Abstract
Growths of nanophased ZrO₂-CeO₂ or TiO₂-ZrO₂-CeO₂ thin films, interesting as catalysts for complete oxidation of hydrocarbons, were performed by using cerium tetrakis-2,2,6,6-tetramethyl-3,5- heptanedionate, zirconium tris-isopropoxy 2,2,6,6-tetramethyl-3,5-heptanedionate and titanium tetraisopropoxide as CVD precursors at a reactor temperature of 380°C. Alumina glass and honeycomb cordierite were used as substrates. Two different approaches were proposed in order to obtain composite oxide films: a sequential deposition of single-phase coatings and thermal treatment of the final multi-layers to favour the interdiffusion, or a co-deposition of CeO₂ and ZrO₂. Both crystallization and intermixing behaviour of composite films were studied after annealing in air at 1000°C by X-ray Diffraction, Scanning Electron Microscopy and X-ray Photoelectron Spectroscopy.

© EDP Sciences 2001