| Numéro |
J. Phys. IV France
Volume 03, Numéro C3, Août 1993
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
|
|
|---|---|---|
| Page(s) | C3-203 - C3-203 | |
| DOI | https://doi.org/10.1051/jp4:1993326 | |
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
J. Phys. IV France 03 (1993) C3-203-C3-203
DOI: 10.1051/jp4:1993326
Department of Chemical Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113, Japan
© EDP Sciences 1993
J. Phys. IV France 03 (1993) C3-203-C3-203
DOI: 10.1051/jp4:1993326
Monte Carlo simulation on the step coverage formation processes in chemical vapor deposition
Y. SHIMOGAKI, T. UCHIDA, S. SHIGA, Y. EGASHIRA and H. KOMIYAMADepartment of Chemical Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113, Japan
Without abstract
© EDP Sciences 1993
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