| Numéro |
J. Phys. IV France
Volume 02, Numéro C2, Septembre 1991
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
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| Page(s) | C2-907 - C2-913 | |
| DOI | https://doi.org/10.1051/jp4:19912109 | |
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
J. Phys. IV France 02 (1991) C2-907-C2-913
DOI: 10.1051/jp4:19912109
Philips Research Laboratories, CVD Technology Group, D-5100 Aachen, Germany
© EDP Sciences 1991
J. Phys. IV France 02 (1991) C2-907-C2-913
DOI: 10.1051/jp4:19912109
DIAMOND CHEMICAL VAPOUR DEPOSITION
P.K. BACHMANN, D. LEERS and D.U. WIECHERTPhilips Research Laboratories, CVD Technology Group, D-5100 Aachen, Germany
Abstract
Preparation, characterisation and selected applications of vapour deposited diamond coatings and free-standing membranes are reviewed. General trends and implications of a C/H/O-phase diagram, which provides a common basis for all diamond CVD methods are discussed.
© EDP Sciences 1991