J. Phys. IV France
Volume 126, June 2005
Page(s) 113 - 116

J. Phys. IV France 126 (2005) 113-116

DOI: 10.1051/jp4:2005126023

Thin film in-plane actuator: Assessment of monolayer and bilayer mechanical output

E. Fribourg-Blanc1, D. Remiens1, E. Cattan1, M. Dupont2 and D. Osmont2

1  IEMN-DOAE-MIMM, CNRS-UMR 8520, 59650 Villeneuve d'Ascq, France
2  ONERA-DMSE, 29 Av. de la Div. Leclerc, BP. 72, 92322 Chatillon, France

This article shows that in an in-plane configuration a thin film and a bulk actuators deliver the same amount of mechanical power under the same voltage. This opens the possibility to reach more powerful actuators while keeping the same geometric dimensions by simply stacking these films. It also demonstrates that the effective transverse-plane piezoelectric coefficient is constant with electric field which is a crucial result for this actuator.

© EDP Sciences 2005