J. Phys. IV France
Volume 118, November 2004
Page(s) 37 - 42

J. Phys. IV France 118 (2004) 37-42

DOI: 10.1051/jp4:2004118004

X-ray orientation determination of single crystals by means of the $\Omega$-Scan Method

H. Berger

EFG International Berlin, Research Center, Dueppelstr. 13, 14163 Berlin, Germany

The X-ray diffractometric $\Omega$-Scan Method uses a skew reflection geometry. Only one measuring circle is necessary to measure the reflection pairs generated at two or more lattice planes. From the angular positions of the reflections, the precise orientation within a certain range can be determined. The method can be applied to the angle sorting of slices or wafers as well as to the adjusting of crystal ingots for the subsequent cutting. For the determination of the completely unknown orientation, the incidence angle of the X-ray beam must be varied over a larger range, until at least three reflection pairs have been found. The $\Omega$-Scan diffractometers can be constructed according to the different demands. They can work fully automatically and can be equipped to allow further diffractometric measurements.

© EDP Sciences 2004