J. Phys. IV France 109 (2003) 1
Thermal conductivity of laser mirror coatings measured by photothermal methodJ. Bodzenta1, B. Burak1, A. Jagoda2 and B. Stanczyk2
1 Institute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland
2 Instituts of Electronic Materials Technology, Wolczynska 133, 01-919 Warsaw, Poland
Thermal properties of thin AlN, AlN-GaN and Si 3N 4 films are investigated. The investigated films have different thickness (~90 nm and ~270 nm) and are deposited on different substrates (Si and GaAs). Photothermal measuring method based on thermal wave propagation in layered structure in 3D geometry is used. A new method for experimental data analysis is proposed. The analysis is carried out after transformation of measured dependences to the inverse space. Obtained results show that the thermal conductivity is higher for films deposited on GaAs substrates and for AIN-GaN films.
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