J. Phys. IV France 104 (2003) 627
X-ray fluorescence tomography for non-destructive semi-quantitative study of microobjectsM. Chukalina1, A. Simionovici2, 3, L. Lemelle3, C. Rau1, L. Vincze4 and Ph. Gillet3
1 Institute of Microelectronics Technology RAS, 142432 Chemogolovka, Russia
2 European Synchrotron Radiation Facility, BP. 220, 38043 Grenoble cedex, France
3 Laboratoire des Sciences de la Terre, ENS Lyon, 69346 Lyon, France
4 MiTAC, University of Antwerp (UIA), Universiteitsplein 1, 2610 Antwerp, Belgium
The goal of this work is to present the current state of the X-ray Fluorescence Computed Microtomography. The advantages of both the experimental techniques and the data processing (the ESRF ID22 beamline facilities ) arc considered. The latter one includes the spectra treatment, reconstruction of the atomic density distribution function of the element under consideration and/or calculation of the element effective concentration map and calculation of the element ratio maps. Possible ways of estimating the space resolution and the accuracy are discussed. Results of the tomographic investigation of the NWA817 meteorite micro-grain are presented.
© EDP Sciences 2003