J. Phys. IV France
Volume 104, March 2003
Page(s) 207 - 210

J. Phys. IV France
104 (2003) 207
DOI: 10.1051/jp4:200300062

Nanofabrication of diffractive optics for soft X-ray and atom beam focusing

S. Rehbein

Georg-August-Universität Göttingen, Institute für Röntgenphysik, Geistsrasse 11, 37073 Göttingen, Germany

Nanostructuring processes are described for manufacturing diffractive optics for the condensermonochromator set-up of the transmission X-ray microscope (TXM) and for the scanning transmission X-ray microscope (STXM) at the BESSY II electron storage ring in Berlin. Furthermore, a process for manufacturing freestanding nickel zone plates for helium atom beam focusing experiments is presented.

© EDP Sciences 2003