Nanofabrication of diffractive optics for soft X-ray and atom beam focusing

Abstract
Nanostructuring processes are described for manufacturing diffractive optics for the condensermonochromator set-up of the transmission X-ray microscope (TXM) and for the scanning transmission X-ray microscope (STXM) at the BESSY II electron storage ring in Berlin. Furthermore, a process for manufacturing freestanding nickel zone plates for helium atom beam focusing experiments is presented.