Numéro
J. Phys. IV France
Volume 08, Numéro PR9, December 1998
2nd European Meeting on Integrated Ferroelectrics
EMIF 2
Page(s) Pr9-147 - Pr9-150
DOI https://doi.org/10.1051/jp4:1998926
2nd European Meeting on Integrated Ferroelectrics
EMIF 2

J. Phys. IV France 08 (1998) Pr9-147-Pr9-150

DOI: 10.1051/jp4:1998926

Integrated ferroelectric polymer pyroelectric sensors : A comparative study of PVDF and its copolymer VDF/TrFE film

D. Setiadi, T.D. Binnie, A. Armitage, K. Benjamin and H. Weller

Department of Electrical Engineering, Napier University, 219 Colinton Road, Edinburgh EH 14 1DJ, U.K.


Abstract
This paper presents a comparative study of integrated pyroelectric sensors based on ferroelectric polymers using different deposition techniques. A 9 µm PVDF film is bonded on a silicon substrate using a capacitive (UV curing acrylic) thin film and a 1 µm VDF/TrFE copolymer is coated directly using a spin-coating technique. The theoretical response of both PVDF and VDF/TrFE pyroelectric sensors are calculated and related to the measured values. Responsivities of 4.3 V/W and 1.2 V/W, at 400 Hz, have been achieved for the pyroelectric sensor based on PVDF and VDF/TrFE copolymer respectively. 1/f noise of the MOSFET is the dominant noise source for both sensors, resulting in an input referred noise voltage of 70 nV/Hz0.5 at 400 Hz.



© EDP Sciences 1998