J. Phys. IV France 07 (1997) C4-397-C4-411
Langmuir Probe Diagnostics for Medium Pressure and Magnetised Low-Temperature PlasmaM. Tichy1, P. Kudrna1, J.F. Behnke2, C. Csambal2 and S. Klagge3
1 Department of Electronics and Vacuum Physics, Faculty of Mathematics and Physics, Charles University, V. Holesovickach 2, 180 00 Prague 8, Czech Republic
2 Institute of Physics, Faculty of Mathematics and Natural Sciences, Ernst-Moritz-Arndt University, Domstrasse 10a, 17487 Greifswald, Germany
3 Rosenweg 7, 17489 Greifswald, Germany
In this contribution we aim at presenting the overview of the work that has been done in expanding the applicability of the probe method to low-temperature plasma at the pressure range when the collisions of charged particles with neutrals start to be important (we call this pressure range medium pressures) and to plasma under the influence of the weak-to-medium magnetic field that is commonly used in plasma enhanced technologies. Most of the discussion is devoted to simple case of a plasma consisting of electrons and of one kind of positive ions. Our review also mostly concerns the cylindrical Langmuir probe. The first part of the article is devoted to discussion on the influence of the positive-ion-neutral collisions on the interpretation of the ion current part of the probe characteristic in order to get the true value of the plasma number density. In the second part one of the theories that take account of this effect is used to assess the influence of the weak magnetic field to the interpretation of the probe data. Finally we discuss the anisotropy of the electron velocity distribution function due to the effect of the magnetic field. The discussion is supported by the new experimental data.
© EDP Sciences 1997