Applications of an Integrated XRF-XRD Spectrometer

Abstract
An X-ray spectrometer which effectively integrates X-ray fluorescence and X-ray diffraction in a single instrument has been developed. The instrument uses same X-ray excitation, sample position, vacuum tank and control systems for both XRF and XRD measurements. It is shown that flexible elemental analysis together with specific phase/compound analysis can be accomplished in a quantitative way using such an instrument. Various applications in industrial process and quality control are illustrated.