J. Phys. IV France
Volume 05, Numéro C5, Juin 1995
Proceedings of the Tenth European Conference on Chemical Vapour Deposition
Page(s) C5-235 - C5-242
Proceedings of the Tenth European Conference on Chemical Vapour Deposition

J. Phys. IV France 05 (1995) C5-235-C5-242

DOI: 10.1051/jphyscol:1995527

CVD as Laminar Phenomena with Homogeneous/Heterogeneous Appearances. A Theoretical Analysis

K.T. Raic

Faculty of Technology and Metallurgy, Belgrade University, P.O. Box 494, 11001 Belgrade, Yugoslavia

This article presents a general mathematical model for describing the CVD transport phenomena at the geometrically usual substrates : foils (plates) and rotating disks ; as well as parallel plates and tube entrances. The model employs an original concept to solve the governing partial differential equations in order to predict the mass transfer at the substrate. Therefore, an approach to the laminar phenomena [2,3,4] established on the simplified form of fundamental partial differential equations is described. On the basis of this equation an integral method is derived. This method is reduced to balance setting of flux gradients (FG-codes) of the transfer phenomena that occur. The present methodology is applied to the laminar phenomena with homogeneous/heterogeneous appearances as appropriate example of CVD simulation. Interphase mass enhancement caused by homogeneous/heterogeneous appearances, is carefully explained. Flux gradient and suface diffusion concepts are used to detemine the concentration distribution near the interphase. The model can be used as a tool in computer-aided process optimization.

© EDP Sciences 1995