3rd French conference on acoustics
J. Phys. IV France 04 (1994) C5-213-C5-216
Mouvement d'une couche de fluide dissipatif en espace clos sous l'action d'une source étendueP. HAMERY, M. BRUNEAU and A.-M. BRUNEAU
Laboratoire d'Acoustique, URA 1101 du CNRS, Université du Maine, Avenue Olivier Messiaen, BP. 535, 72017 Le Mans cedex, France
In recent years, the growing demand for miniaturized transducers and the widespread use of silicon technology, has focused interest on the design of condenser or electret microphones on a silicon chip. But the theoretical models used are those existing for conventional microphones, which do not remain valid for miniaturized transducers, if good accuracy is expected. The main purpose of the paper is to consider the forced vibrations of the membranes (or plates), driven by an external source (here an incident acoustic pressure field), backed by a very thin layer of fluid and a rigid plane wall, and surrounded by a reservoir around its periphery. The "exact" statement of the problem is obtained by taking into account effects of heat conduction, bulk and shear viscosity, impedance of the surrounding cavity, and so on, avoiding the approximations currently in use. An improved analytical solution is obtained and some new features are indicated.
© EDP Sciences 1994