J. Phys. IV France 04 (1994) C1-283-C1-294
Les capteurs électrochimiques microniquesP. CLECHET, N. JAFFREZIC-RENAULT and C. MARTELET
Laboratoire de Physicochimie des Interfaces, Ecole Centrale de Lyon, BP. 163, 69131 Ecully cedex, France
Presently, two main factors influence the evolution of both chemical and electrochemical sensors. The first is the very strong demand in sensors from various fields of industry. The second is the intrusion of microelectronic technologies in their fabrication processes which lead to the new concept of miniaturized sensors. The advantages of such small sensors are discussed. The various technologies of miniaturization used in the fabrication of electrochemical sensors are reviewed as well as the various methods of sensitization employed to functionalize the microtransducers, especially the Field Effect Transistors (FET).
© EDP Sciences 1994