Growth of BON thin films by plasma assisted MOCVD and study of deposition parameter effects on the film structure G.C. Chen, M.C. Kim, T.H. Kim, S.-B. Lee et J.-H. Boo J. Phys. IV France, 11 PR3 (2001) Pr3-763-Pr3-770 DOI: 10.1051/jp4:2001396