Journal de Physique IV

Principles for Controlling the Electronic Quality of High-Rate Deposited a-Si:H Films

G. Suchaneck, T. Blum, S. Röhlecke and A. Kottwitz

J. Phys. IV France, 05 C5 (1995) C5-655-C5-661

DOI: 10.1051/jphyscol:1995578

G. Suchaneck

T. Blum

S. Röhlecke

A. Kottwitz

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