Journal de Physique IV

Vapor pressure of precursors for CVD on the base of platinum group metals

N.B. Morozova, G.I. Zharkova, P.P. Semyannikov, S.V. Sysoev, I.K. Igumenov, N.E. Fedotova and N.V. Gelfond

J. Phys. IV France, 11 PR3 (2001) Pr3-609-Pr3-616

DOI: 10.1051/jp4:2001377

N.B. Morozova

G.I. Zharkova

P.P. Semyannikov

S.V. Sysoev

I.K. Igumenov

N.E. Fedotova

N.V. Gelfond

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