Journal de Physique IV

Silicon oxide nanolayers for soft X-ray optics produced by plasma enhanced CVD

F. Hamelmann, A. Aschentrup, J. Schmalhorst, U. Kleineberg, U. Heinzmann, K. Dittmar and P. Jutzi

J. Phys. IV France, 11 PR3 (2001) Pr3-431-Pr3-436

DOI: 10.1051/jp4:2001354

F. Hamelmann

A. Aschentrup

J. Schmalhorst

U. Kleineberg

U. Heinzmann

K. Dittmar

P. Jutzi

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